Diagnostics of cutting arc plasmas

Diagnostics of etching plasmas *

Radio-frequency excited, low-pressure plasmas in halogen-containing gases are widely used to etch submicronic features in a range of materials during integrated circuit manufacture. Costly process-drift problems are often caused by the ubiquitous deposition of polymer layers on the reactor walls. Simple and robust sensors of the reactor performance are needed to monitor and manage these effects...

Diagnostics of laser-produced plasmas

Laser-produced plasmas are used for a variety of studies, relevant for both basic physics and applications, and are of course essential within the study of inertial confi nement approach to nuclear fusion. Because of this large interest, a large variety of diagnostics have been developed and are routinely used to unveil the physical processes at work during plasma process and laser-plasma inter...

Diagnostics of Laser Plasmas by THz-Spectroscopy

We probe the electron dynamics in laser excited, gaseous plasmas by ultrashort pulses of broadband THz radiation as shown in Fig. 1. The plasma is created by an 800 nm, 0.6 mJ, 20 fs pulse from an amplified Ti:sapphire laser. Targets are samples of different gases, such as Ar, Ne, O2, H2, SF6 or Ar-SF6 mixtures, under ambient pressure which become up to 10% ionized. The probing THz pulse is obt...

Numerical Modelling of a Cutting Arc Torch

Ion energy distribution functions of vacuum arc plasmas